The Malema CIFM-88 Series is a high-purity Coriolis flow meter designed for extremely accurate measurement of liquid mass flow, density, and temperature in semiconductor and advanced chemical process applications. The meter uses a direct Coriolis measurement principle, allowing highly precise flow monitoring independent of fluid conductivity, viscosity, pressure, or temperature variations. This makes the series especially suitable for critical chemical delivery and blending applications where process accuracy and repeatability are essential.

The CIFM-88 Series features an all-PFA wetted flow path with no exposed metal wetted surfaces, minimizing contamination risks and ensuring excellent compatibility with aggressive chemicals and ultrapure fluids. The compact inline design supports low internal volume, fast response time, and excellent drainability for high-purity process systems. Integrated electronics provide analog outputs, digital communication, diagnostics, and alarm functionality for advanced process control integration.

Typical applications include semiconductor wet processing, chemical blending systems, CMP slurry delivery, ultrapure DI water systems, photoresist dispensing, chemical dosing systems, and high-purity process monitoring requiring contamination-free ultra-accurate flow measurement and chemical compatibility.