CMFC‑5000

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Coriolis-based flow controller

Delivering a measurement and control accuracy of ±1.5%, the CMFC-5000 Integrated Coriolis Flow Controller Series by Malema is designed for high-purity applications in the semiconductor market. This series features PTFE/PFA wetted parts and offers flow rate ranges from 50 to 4,000 grams per minute with a response time of under two seconds. The advanced digital signal processing technology ensures reliability despite changes in density, viscosity, or temperature, and can accurately measure flows with up to 30% bubble presence. The CMFC-5000 minimizes downtime, enhances yield throughput, and boosts operational profitability in the semiconductor industry.

• Patented plastic Coriolis mass flow controller with ±1.5% of setpoint accuracy and fast response (~2 s typical)
• Mass flow measurement independent of fluid density, viscosity, flow regime, or velocity profile
• PTFE/PFA wetted construction for UHP chemicals, DI water, and CMP slurry applications; supports two-phase flow (>30% gas void)
• Integrated closed-loop control with pinch or diaphragm valve options; optional temperature and pressure sensing for multi-variable output
• Available in 1/4" and 3/8" sizes with flow ranges from 25 to 4,000 g/min, optimized for blending and dispense systems

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