CMFC‑5000
Malema Coriolis-based flow controller
Coriolis-based flow controller
The Malema CMFC-5000 Series is a high-performance integrated Coriolis mass flow controller designed for precise closed-loop control of high-purity liquids, chemicals, and CMP slurries in semiconductor and advanced process applications. The system combines an advanced Coriolis mass flow meter with a high-speed precision control valve to provide extremely accurate and repeatable flow control independent of fluid density, viscosity, temperature, or flow profile variations.
The CMFC-5000 Series features an all-PFA/PTFE wetted flow path with no moving parts or dynamic seals in the flow sensor, minimizing contamination risk, dead volume, particle generation, and maintenance requirements. Depending on the application, the controller utilizes either a precision diaphragm valve for chemicals or a motor-actuated pinch valve for slurry applications. Advanced digital signal processing allows accurate operation even with entrained gas bubbles exceeding 30% volumetric void conditions.
The series supports flow ranges from approximately 50 to 4000 grams per minute with control accuracy up to ±1.5% of set point and response times typically below two seconds. Available configurations include 1/4" and 3/8" flare or pillar connections with analog control and monitoring outputs for integration into semiconductor process equipment and industrial automation systems.
Typical applications include CMP slurry delivery, chemical blending systems, wet cleaning tools, copper plating systems, ultrapure DI water control, semiconductor wet process equipment, and precision chemical dispense systems requiring contamination-free high-accuracy flow control.
The CMFC-5000 Series features an all-PFA/PTFE wetted flow path with no moving parts or dynamic seals in the flow sensor, minimizing contamination risk, dead volume, particle generation, and maintenance requirements. Depending on the application, the controller utilizes either a precision diaphragm valve for chemicals or a motor-actuated pinch valve for slurry applications. Advanced digital signal processing allows accurate operation even with entrained gas bubbles exceeding 30% volumetric void conditions.
The series supports flow ranges from approximately 50 to 4000 grams per minute with control accuracy up to ±1.5% of set point and response times typically below two seconds. Available configurations include 1/4" and 3/8" flare or pillar connections with analog control and monitoring outputs for integration into semiconductor process equipment and industrial automation systems.
Typical applications include CMP slurry delivery, chemical blending systems, wet cleaning tools, copper plating systems, ultrapure DI water control, semiconductor wet process equipment, and precision chemical dispense systems requiring contamination-free high-accuracy flow control.
• Patented plastic Coriolis mass flow controller with ±1.5% of setpoint accuracy and fast response (~2 s typical)
• Mass flow measurement independent of fluid density, viscosity, flow regime, or velocity profile
• PTFE/PFA wetted construction for UHP chemicals, DI water, and CMP slurry applications; supports two-phase flow (>30% gas void)
• Integrated closed-loop control with pinch or diaphragm valve options; optional temperature and pressure sensing for multi-variable output
• Available in 1/4" and 3/8" sizes with flow ranges from 25 to 4,000 g/min, optimized for blending and dispense systems
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