The Malema CMFC-6000 Series is a high-precision Coriolis mass flow controller designed for accurate closed-loop control of high-purity liquids and aggressive chemicals in semiconductor and advanced industrial process applications. The controller combines a Coriolis mass flow sensor with an integrated precision control valve, allowing direct mass flow control independent of pressure, temperature, density, or viscosity variations. This provides extremely stable and repeatable dosing performance in critical process environments.

The CMFC-6000 Series features an all-fluoropolymer wetted flow path with no exposed metal wetted surfaces, minimizing contamination risk and ensuring excellent compatibility with corrosive chemicals and ultrapure process fluids. Advanced digital signal processing enables highly accurate low-flow control with fast response times and stable operation even under changing process conditions. Depending on the application, the system may utilize diaphragm or pinch valve technology for optimized chemical or slurry handling performance.

Available communication and control interfaces include analog outputs, digital communication protocols, alarms, and integrated diagnostics for semiconductor automation systems. Typical applications include CMP slurry delivery, semiconductor wet processing, chemical blending systems, photoresist dispensing, ultrapure DI water control, plating systems, and high-purity chemical delivery applications requiring contamination-free ultra-accurate flow control.