CMFC‑6000

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Advanced Coriolis flow control

The CMFC-6000 Integrated Coriolis Flow Controller Series by Malema delivers measurement and control accuracy of ± 1%, specifically designed for the semiconductor industry. It features an integrated pressure transducer and patented technology, working effectively in various high-purity applications such as DI water and harsh chemicals. With models available in 1/4” or 3/8” port sizes and flow rates from 50 to 2,500 grams per minute, it ensures fast control with a response time under two seconds. This technology serves as a drop-in replacement for other controllers, preventing sensor drift and maintaining consistent flow amid variable conditions, including fluid density and temperature changes. The CMFC-6000 accurately measures flow even with up to 30% bubble presence, reducing downtime and enhancing operational profitability in semiconductor processes.

• Drop-in replacement Coriolis mass flow controller for differential pressure flow meters, with patented plastic Coriolis technology
• High accuracy (±1% of setpoint) and fast response (~2 s typical), independent of fluid density, viscosity, or flow regime
• PTFE/PFA wetted construction for UHP chemicals and DI water; eliminates sensor drift due to environmental or temperature changes
• Capable of measuring two-phase flow with gas volumetric void fractions >30%, with integrated closed-loop control and dynamic temperature compensation
• Available in 1/2", 3/4", and 1" sizes with flow ranges from 50 to 2,500 g/min, including built-in pressure sensor analog output

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