CPFM‑8800

Malema Coriolis, high-precision flow sensing
Coriolis, high-precision flow sensing
The Malema CPFM-8800 Series is a high-purity ultrasonic flow meter designed for precise, non-invasive measurement of aggressive chemicals and ultrapure liquids in semiconductor and advanced process applications. The meter uses clamp-on ultrasonic sensing technology, eliminating direct contact between the sensing element and the process fluid. This design minimizes contamination risk, pressure drop, dead volume, and maintenance requirements while maintaining highly accurate flow measurement performance.

The CPFM-8800 Series is specifically engineered for semiconductor wet process systems and high-purity chemical delivery applications where contamination control and chemical compatibility are critical. The system supports a wide range of fluoropolymer tubing materials including PFA and PTFE and provides high sensitivity at very low flow rates with excellent repeatability and fast response characteristics. Integrated digital electronics support analog outputs, alarms, and industrial communication interfaces for process automation integration.

Typical applications include CMP slurry delivery, chemical dosing systems, ultrapure DI water monitoring, semiconductor wet benches, filtration monitoring, chemical blending systems, and corrosive fluid handling systems requiring contamination-free high-accuracy flow measurement.
• Flow measurement independent of fluid properties, eliminating the need for recalibration across different fluids
• Accuracy unaffected by flow regime (laminar or turbulent) or velocity profile variations
• Capable of measuring two-phase flow with gas volumetric void fractions >30%
• High-accuracy control within ±1% of reading, optimized for blending and dispensing applications with reduced chemical consumption
• All-PFA wetted construction with patented Coriolis technology, suitable for UHP liquids and DI water

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