




CPFM‑8800
The CPFM-8800 Series is specifically engineered for semiconductor wet process systems and high-purity chemical delivery applications where contamination control and chemical compatibility are critical. The system supports a wide range of fluoropolymer tubing materials including PFA and PTFE and provides high sensitivity at very low flow rates with excellent repeatability and fast response characteristics. Integrated digital electronics support analog outputs, alarms, and industrial communication interfaces for process automation integration.
Typical applications include CMP slurry delivery, chemical dosing systems, ultrapure DI water monitoring, semiconductor wet benches, filtration monitoring, chemical blending systems, and corrosive fluid handling systems requiring contamination-free high-accuracy flow measurement.
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