The Malema LFC-7000 Series is a high-performance ultrasonic liquid flow controller designed for precise closed-loop control of high-purity liquids, aggressive chemicals, DI water, and CMP polishing slurries in semiconductor and advanced process applications. The system combines an ultrasonic flow meter with an integrated precision control valve to deliver highly accurate, stable, and repeatable flow control independent of fluid density, viscosity, temperature, or entrained gases.

The LFC-7000 Series features an all-PFA/PTFE wetted flow path with no moving parts or seals inside the flow sensor, minimizing contamination risk, particle generation, pressure loss, and maintenance requirements. Depending on the application, the controller is equipped with either a motor-actuated pinch valve for slurry applications or a diaphragm valve for chemical dosing applications. Advanced DSP signal processing technology ensures stable operation even with bubbles present in the process fluid.

Typical performance includes ±1% set point accuracy, repeatability up to ±0.5%, flow control ranges from approximately 5 to 12,000 mL/min, and response times typically below 3 seconds. The series supports analog and digital communication interfaces for integration into semiconductor process tools and industrial automation systems. Available configurations include 1/4", 3/8", and 1/2" flare or pillar connections with horizontal or vertical mounting options.

Typical applications include CMP slurry delivery, semiconductor wet clean systems, chemical blending systems, copper plating systems, ultrapure chemical dispensing, post-CMP cleaning equipment, and high-purity process systems requiring contamination-free ultra-accurate liquid flow control.