With ±1% metering accuracy, the LFC-7000 Series Ultrasonic Flow Controller with integral display provides superior performance in all operating conditions, regardless of density, viscosity, gases or temperature. The LFC-7000 line of closed-loop flow control modules is designed for wet clean tools and post-CMP cleaning applications with a wide range of flow control from 5 to 12,000 mL/min, while the integral display offers immediate dispensing feedback.The LFC-7000 Series Ultrasonic Flow Controller combines flow meter technology with a control valve for complete control of dispensing of any slurries or chemistries. The flow meter features an all-PFA construction with no moving parts or seals, setting the standard for flow measurement in terms of accuracy, repeatability, and purity. Equipped with either a motor-actuated pinch valve (for slurries) or a diaphragm valve (for chemistries), the LFC-7000 provides a fast and precise response with minimal “overshoot.” The control valve features all PTFE (polytetrafluoroethylene) construction and minimal dead volume, ensuring maximum process purity and reliability.