




M‑1500MB
The MPT-1500MB Series is engineered for semiconductor wet process systems where contamination control, chemical resistance, and long-term measurement stability are critical. Its compact inline design supports installation in confined chemical delivery and ultrapure fluid systems while maintaining fast response characteristics and low internal dead volume. The sensor provides highly stable pressure measurement with analog output options suitable for integration into industrial automation and process control systems.
Typical applications include semiconductor wet benches, CMP slurry systems, chemical delivery systems, ultrapure DI water distribution, filtration monitoring, chemical blending systems, and high-purity process monitoring requiring contamination-free pressure measurement and excellent corrosion resistance.
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