




M‑2300
The M-2300 Series features a straight-through PFA flow tube with wedge-mounted piezoelectric ultrasonic transducers integrated into a compact inline assembly. The all-PFA wetted flow path provides excellent corrosion resistance and compatibility with aggressive chemicals and ultrapure fluids. Its seamless inline design eliminates dead legs and metering cutoffs while supporting excellent cleanability and process purity.
Typical performance includes ±1% full-scale accuracy, ±0.5% repeatability, minimal pressure loss, and support for analog, pulse, and Modbus RS-485 communication outputs. Available tube sizes include 1/4", 3/8", and 1/2" configurations for a wide range of semiconductor process applications.
Typical applications include CMP slurry delivery, wet clean systems, ECD and electroless deposition systems, cooling systems, laser equipment, solar PV manufacturing equipment, chemical distribution systems, and high-purity wet process applications requiring contamination-free and highly accurate liquid flow measurement.
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