




M-61
The M-61 Series utilizes a right-angle flow path with 1/4" or 3/8" flare connections and is available in SPST and SPDT electrical configurations. Typical flow ranges are 20–7,600 CCM for water and 300–55,000 SCCM for air, with set point accuracy up to ±10% and repeatability of ±5%. The switch supports customized factory-calibrated set points for precise application requirements.
Typical applications include semiconductor process equipment, laser cooling systems, vacuum systems, water treatment systems, chillers, welding systems, sample flow monitoring, and corrosive fluid handling systems requiring dependable low-flow indication and alarm functionality.
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