The Malema MPT-750 Series is a high-purity PFA pressure and temperature sensor designed for accurate monitoring of aggressive chemicals and ultrapure fluids in semiconductor wet process applications. The sensor combines pressure and optional temperature measurement within a single compact device, reducing installation complexity while supporting reliable process control in contamination-sensitive environments.

The MPT-750 features all-PFA and FFKM wetted materials with no exposed metal wetted parts, making it highly resistant to corrosive chemicals and suitable for ultrapure chemical distribution systems. Available in both single-port and inline flow-through configurations, the series supports tube, pillar, and flare process connections for flexible system integration. The sensor is available with cable connection or Hirose connector configurations depending on the model version.

Typical performance includes ±1% full-scale accuracy, ±0.5% repeatability, analog 4–20 mA or 0–10 VDC outputs, optional dual temperature output, and RS-485 communication capability. Typical applications include wet etch systems, wet cleaning systems, CMP slurry systems, ECD systems, chemical blending systems, semiconductor chemical delivery systems, and ultrapure process monitoring where contamination-free pressure and temperature measurement are critical.